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Two photon 3D laser direct writing lithography machine&photoresist
- High-throughput three-dimensional direct-write lithography
MPD-Multi-Channel
- Custom 3D Direct Write Lithography
MPD-OEM
- Standard 3D Direct Write Lithography (200nm)
MPD-4inch
- High Precision 3D Direct Write Lithography (50nm)
MPD-OEM
- two-photon photoresist
PPI
General parameters
|
system parameter |
|
|
Support printing height |
≤10mm |
|
Highest surface roughness (Ra) |
≤5nm |
|
Minimum feature line width |
≤ 50nm(XYplane) and≤ 300nm(Zaxis) |
|
Minimum period (XYplane) |
≤300nm; Z≤600nm; |
|
Maximum scanning speed |
≥100mm/s (1000mm/s@100x objective lens） |
|
Splicing accuracy |
≤ 100nm(XYPlane) |
|
Support engraving area (circular) |
Diameter4inches (customizable) |
|
Laser parameters |
|
|
Center wavelength |
515±5nm |
|
Average power |
≥1W |
|
Pulse width |
≤ 200fs |
|
Power stability |
< 1%RMS |
|
Beam quality |
< 1.2 |
|
Repetition frequency |
80±5MHz |
|
System size |
|
|
Appearance size |
Width 1700mm × Depth 1500mm × Height 2200mm |
|
Weight |
< 2000kg |
|
Installation conditions |
Cleanrooms with a cleanliness level of over 1000; The seismic isolation level is superior to VC-C |
|
Electrical conditions |
220/380V, Power>; 5kW |
|
Environment stability |
20±1℃;±0.1℃;Noise level < 65dB;Humidity ±5%(temperature control) |
|
Compressed air |
Filter to0.25 μ m, oil-free, stable at0.5-0.6MPa, flow rate should be within500-800SPLM |
|
Environmental lighting |
Yellow light |
Contact Information
Address: Room 101, Building 5, Building 1, No. 666 Zhenhua Road, Sandun Town, Xihu District, Hangzhou City
Email：info@yzqim.com
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